Nano and micro electomechanical systems: fundamentals of nano and microengineering

Detalles Bibliográficos
Autor Principal: Lyshevski, Sergey Edward
Formato: Printed Book
Idioma:English
Publicado: Boca Raton CRC Press 2005
Edición:2nd ed.
Subjects:
Microelectronics > Electronics > Semiconductors > Nanotechnology > Microelectromechanical systems > MEMS > NEMS > Nanoelectromechanical systems > Biomimetics

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