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Nano and micro electomechanical systems: fundamentals of nano and microengineering
| Egile nagusia: | Lyshevski, Sergey Edward |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
Boca Raton
CRC Press
2005
|
| Edizioa: | 2nd ed. |
| Gaiak: |
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