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Nano and micro electomechanical systems: fundamentals of nano and microengineering

Bibliographic Details
Main Author:	Lyshevski, Sergey Edward
Format:	Printed Book
Language:	English
Published:	Boca Raton CRC Press 2005
Edition:	2nd ed.
Subjects:	Microelectronics > Electronics > Semiconductors > Nanotechnology > Microelectromechanical systems > MEMS > NEMS > Nanoelectromechanical systems > Biomimetics

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