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Nano and micro electomechanical systems: fundamentals of nano and microengineering

Bibliografiske detaljer
Hovedforfatter:	Lyshevski, Sergey Edward
Format:	Printed Book
Sprog:	English
Udgivet:	Boca Raton CRC Press 2005
Udgivelse:	2nd ed.
Fag:	Microelectronics > Electronics > Semiconductors > Nanotechnology > Microelectromechanical systems > MEMS > NEMS > Nanoelectromechanical systems > Biomimetics

Lignende værker

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Nanotechnology for microelectronics and optoelectronics
af: Martinez-Duart, J.M
Udgivet: (2006)

Microsensor, MEMS and smart devices
af: Gardner, Julian W.
Udgivet: (2007)

MEMS
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Udgivet: (2007)

Principles and applications of NanoMEMS physics
af: Dogra, H. R.
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MEMS: introduction and fundamentals
af: Gad-el-Hak, Muhamed [ed.]
Udgivet: (2006)

Future trends in microelectronics: up the nano creek
af: Luryi, Serge
Udgivet: (2007)

BioNanoFluidic MEMS /
Udgivet: (2008)

NanoBioTechnology
af: Oded Shoseyov [ editor ]
Udgivet: (2008)

Fundamentals of BioMEMS and medical microdevices
af: Saliterman, Steven S.
Udgivet: (2005)

Nano and giga challenges in microelectronics
af: Greer, Jim
Udgivet: (2003)

Electromechanics and MEMS
af: Jones, Thomas B
Udgivet: (2013)

Principles and applications of NanoMEMS physics /
af: Santos, Héctor J. de los
Udgivet: (2005)

Principles and applications of NanoMEMS physics /
af: Santos, Hector J. de los
Udgivet: (2005)

Fundamentals of microfabrication and nanotechnology /
af: Madou, Marc J.
Udgivet: (2012)

nano-micro interface: bridging the micro and nano worlds
af: Fecht, Hans-Jorg
Udgivet: (2004)

Advances in multiphysics simulation and experimental testing of Mems
af: Frangi, Attilio
Udgivet: (2008)

Nanodevices for the life sciences
af: S. S. R. Kumar
Udgivet: (2011)

Inertial MEMS principles and practice
af: Kempe, Volker
Udgivet: (2011)

Nanoscale device physics : science and engineering fundamentals /
af: Tiwari, Sandip

Microsystems and nanotechnology /
Udgivet: (2012)

Scaling issues and design of MEMS
af: Baglio, Salvatore
Udgivet: (2007)

MEMS and microsystems : design, manufacture, and nanoscale engineering /
af: Hsu, Tai-Ran
Udgivet: (2008)

Advanced MEMS packaging/
af: Lau, John H.
Udgivet: (2010)

Micro and smart devices and systems
af: Vinoy, K.J....[et.al.]
Udgivet: (2014)

Nanosystems design and technology /
Udgivet: (2009)

Inertial MEMS: principles and practice
af: Kempe, Volker; Author
Udgivet: (2011)

The Nano-Micro interface : bridging the micro and nano worlds
Udgivet: (2015)

The Nano-Micro interface : bridging the micro and nano worlds
Udgivet: (2015)

The Nano-Micro interface : bridging the micro and nano worlds
Udgivet: (2015)

Introductory MEMS : fabrication and applications /
af: Adams, Thomas M.
Udgivet: (2010)

Micromanufacturing and nanotechnology
af: Mahalik, N.P.[ed.]
Udgivet: (2006)

Fundamentals of microfabrication /
af: Madou, Marc J.
Udgivet: (1997)

Handbook of nanophysics.
Udgivet: (2011)

Micro manufacturing and nano technology
af: Avasti, Shekar
Udgivet: (2009)

Micro manufacturing and nano technology
af: Avasti, Shekar
Udgivet: (2009)

The Nano-microinterface : bridging the micro and nano worlds
af: Fecht, Hans-Jorg
Udgivet: (2004)

Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEMS-manufacturing techniques and applications/
af: Madou, Marc J.
Udgivet: (2012)