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| LEADER |
00873nam a2200253 a 4500 |
| 001 |
adlib96000001 |
| 003 |
ViArRB |
| 005 |
20151026132210.0 |
| 008 |
960221s1955 dcuabcdjdbkoqu001 0deng d |
| 020 |
|
|
|a 0-8493-2838-1
|
| 022 |
|
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| 040 |
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|a Adlib
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| 082 |
|
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|a 621.382:620.3
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| 245 |
|
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|a Nano and micro electomechanical systems: fundamentals of nano and microengineering
|
| 250 |
|
|
|a 2nd ed.
|
| 260 |
|
|
|a Boca Raton
|b CRC Press
|c 2005
|
| 300 |
|
|
|a 722p.
|
| 500 |
|
|
|a
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| 100 |
|
|
|a Lyshevski, Sergey Edward
|
| 700 |
|
|
|
| 942 |
|
|
|c BK
|6 _
|
| 653 |
|
|
|a Microelectronics
|a Electronics
|a Semiconductors
|a Nanotechnology
|a Microelectromechanical systems
|a MEMS
|a NEMS
|a Nanoelectromechanical systems
|a Biomimetics
|
| 999 |
|
|
|c 43597
|d 43597
|
| 952 |
|
|
|0 0
|1 0
|4 0
|6 6213826203_LYS
|7 0
|9 55770
|a UL
|b UL
|d 2010-06-16
|l 9
|o 621.382:620.3 LYS
|p 00055255
|r 2013-09-25
|s 2013-09-09
|w 2010-06-16
|y BK
|