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Nano and micro electomechanical systems: fundamentals of nano and microengineering
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| Format: | Printed Book |
| Langue: | English |
| Publié: |
Boca Raton
CRC Press
2005
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| Édition: | 2nd ed. |
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| Description: | |
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| Description matérielle: | 722p. |
| ISBN: | 0-8493-2838-1 |