Nano and micro electomechanical systems: fundamentals of nano and microengineering

Lignende værker

• Modeling MEMS and NEMS
  af: Pelesko, John A.
  Udgivet: (2007)
• Modeling and control for micro/nano devices and systems /
  Udgivet: (2014)
• MEMS and microsystems: design and manufacture
  af: Hsu, Tai-Ran
  Udgivet: (2005)
• Nanotechnology for microelectronics and optoelectronics
  af: Martinez-Duart, J.M
  Udgivet: (2006)
• Microsensor, MEMS and smart devices
  af: Gardner, Julian W.
  Udgivet: (2007)