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| 040 |
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|a Adlib
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| 082 |
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|a 621-791
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| 245 |
|
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|a Handbook of surface and nanometrology
|
| 250 |
|
|
|
| 260 |
|
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|a Bristol
|b Institute of physics publishing
|c 2003
|
| 300 |
|
|
|a xx, 1150p.
|
| 500 |
|
|
|a
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| 100 |
|
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|a Whitehouse, David J.
|
| 700 |
|
|
|
| 942 |
|
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|c REF
|6 _
|
| 653 |
|
|
|a metrology
|a Surface metrology
|a Nanometrology
|
| 999 |
|
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|c 43585
|d 43585
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| 952 |
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|0 0
|1 0
|4 0
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|b UL
|d 2010-06-16
|o 621-791 WHI
|p 00055125
|r 2010-06-16
|w 2010-06-16
|y REF
|