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MEMS: introduction and fundamentals

书目详细资料
主要作者:	Gad-el-Hak, Muhamed [ed.] (ed. by)
格式:	Printed Book
语言:	English
出版:	Boca Raton CRC Taylor & Francis 2006
版:	2nd ed.
丛编:	(Mechanical Engineering)
主题:	Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals

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