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MEMS: introduction and fundamentals

Bibliografiska uppgifter
Huvudupphovsman:	Gad-el-Hak, Muhamed [ed.] (ed. by)
Materialtyp:	Printed Book
Språk:	English
Publicerad:	Boca Raton CRC Taylor & Francis 2006
Upplaga:	2nd ed.
Serie:	(Mechanical Engineering)
Ämnen:	Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals

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