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MEMS: introduction and fundamentals

Detalhes bibliográficos
Autor principal:	Gad-el-Hak, Muhamed [ed.] (ed. by)
Formato:	Printed Book
Idioma:	English
Publicado em:	Boca Raton CRC Taylor & Francis 2006
Edição:	2nd ed.
Colecção:	(Mechanical Engineering)
Assuntos:	Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals

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