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MEMS: introduction and fundamentals

Sonraí Bibleagrafaíochta
Príomhúdar:	Gad-el-Hak, Muhamed [ed.] (ed. by)
Formáid:	Printed Book
Teanga:	English
Foilsithe:	Boca Raton CRC Taylor & Francis 2006
Eagrán:	2nd ed.
Sraith:	(Mechanical Engineering)
Ábhair:	Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals

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