MEMS: introduction and fundamentals

Détails bibliographiques
Auteur principal: Gad-el-Hak, Muhamed [ed.] (ed. by)
Format: Printed Book
Langue:English
Publié: Boca Raton CRC Taylor & Francis 2006
Édition:2nd ed.
Collection:(Mechanical Engineering)
Sujets:
Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals

Documents similaires

Documents similaires