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MEMS: introduction and fundamentals

Bibliographic Details
Main Author:	Gad-el-Hak, Muhamed [ed.] (ed. by)
Format:	Printed Book
Language:	English
Published:	Boca Raton CRC Taylor & Francis 2006
Edition:	2nd ed.
Series:	(Mechanical Engineering)
Subjects:	Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals

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