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MEMS: introduction and fundamentals

Dades bibliogràfiques
Autor principal:	Gad-el-Hak, Muhamed [ed.] (ed. by)
Format:	Printed Book
Idioma:	English
Publicat:	Boca Raton CRC Taylor & Francis 2006
Edició:	2nd ed.
Col·lecció:	(Mechanical Engineering)
Matèries:	Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals

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