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01104nam a22002297a 4500 |
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| 008 |
091022t xxu||||| |||| 00| 0 eng d |
| 080 |
|
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|a 621(035)
|b GAD.1
|
| 100 |
|
|
|a Gad-el-Hak, Muhamed [ed.]
|e ed. by
|9 7939
|
| 245 |
|
|
|a MEMS:
|b introduction and fundamentals
|
| 300 |
|
|
|a various pagination
|b 3v.
|
| 490 |
|
|
|a (Mechanical Engineering)
|
| 653 |
|
|
|a Microelectronics
|a Nanotechnology
|a Microelectromechanical systmes
|a MEMs-fundamentals
|
| 942 |
|
|
|c REF
|6 _
|
| 260 |
|
|
|a Boca Raton
|b CRC Taylor & Francis
|c 2006
|9 6966
|
| 500 |
|
|
|a V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
|
| 250 |
|
|
|a 2nd ed.
|
| 020 |
|
|
|a 0-8493-9137-7
|
| 999 |
|
|
|c 3513
|d 3513
|
| 952 |
|
|
|0 0
|1 0
|2 udc
|4 0
|6 621035_GAD1R
|7 1
|9 14155
|a UL
|b UL
|c REF
|d 2009-10-22
|o 621(035) GAD.1 R
|p 00055116
|r 2009-10-22
|w 2009-10-22
|y REF
|
| 952 |
|
|
|0 0
|1 0
|2 udc
|4 0
|6 621035_GAD2R
|7 1
|9 14156
|a UL
|b UL
|c REF
|d 2012-11-02
|o 621(035) GAD.2 R
|p 00055117
|r 2012-11-02
|w 2012-11-02
|y REF
|
| 952 |
|
|
|0 0
|1 0
|2 udc
|4 0
|6 621035_GAD3R
|7 1
|9 14157
|a UL
|b UL
|c REF
|d 2012-11-02
|o 621(035) GAD.3 R
|p 00055118
|r 2012-11-02
|w 2012-11-02
|y REF
|