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MEMS: introduction and fundamentals
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| 格式: | Printed Book |
| 语言: | English |
| 出版: |
Boca Raton
CRC Taylor & Francis
2006
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| 版: | 2nd ed. |
| 丛编: | (Mechanical Engineering)
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| 主题: |
| Item Description: | V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications |
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| 实物描述: | various pagination 3v. |
| ISBN: | 0-8493-9137-7 |