MEMS: introduction and fundamentals

Sonraí Bibleagrafaíochta
Príomhúdar: Gad-el-Hak, Muhamed [ed.] (ed. by)
Formáid: Printed Book
Teanga:English
Foilsithe: Boca Raton CRC Taylor & Francis 2006
Eagrán:2nd ed.
Sraith:(Mechanical Engineering)
Ábhair:
Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals
Cur Síos
Cur Síos ar an Mír:V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
Cur Síos Fisiciúil:various pagination 3v.
ISBN:0-8493-9137-7

Míreanna Comhchosúla