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MEMS: introduction and fundamentals
| Hovedforfatter: | |
|---|---|
| Format: | Printed Book |
| Sprog: | English |
| Udgivet: |
Boca Raton
CRC Taylor & Francis
2006
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| Udgivelse: | 2nd ed. |
| Serier: | (Mechanical Engineering)
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| Fag: |
| Emne beskrivelse: | V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications |
|---|---|
| Fysisk beskrivelse: | various pagination 3v. |
| ISBN: | 0-8493-9137-7 |