MEMS: introduction and fundamentals

Détails bibliographiques
Auteur principal: Gad-el-Hak, Muhamed [ed.] (ed. by)
Format: Printed Book
Langue:English
Publié: Boca Raton CRC Taylor & Francis 2006
Édition:2nd ed.
Collection:(Mechanical Engineering)
Sujets:
Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals
Description
Description:V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
Description matérielle:various pagination 3v.
ISBN:0-8493-9137-7

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