MEMS: introduction and fundamentals

Bibliographic Details
Main Author: Gad-el-Hak, Muhamed [ed.] (ed. by)
Format: Printed Book
Language:English
Published: Boca Raton CRC Taylor & Francis 2006
Edition:2nd ed.
Series:(Mechanical Engineering)
Subjects:
Microelectronics > Nanotechnology > Microelectromechanical systmes > MEMs-fundamentals
Description
Item Description:V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
Physical Description:various pagination 3v.
ISBN:0-8493-9137-7

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