Micro - nano fabrication: technologies and applications

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Bibliografske podrobnosti
Glavni avtor: Cui, Zheng
Format: Printed Book
Jezik:English
Izdano: Beijing Higher education press 2005
Teme:
Optical lithography > Electron beam lithography > Ion beam lithography > Fabrication technologies

UL

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Signatura: 621.71.9 CUI
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