Micro - nano fabrication: technologies and applications

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Bibliographic Details
Main Author: Cui, Zheng
Format: Printed Book
Language:English
Published: Beijing Higher education press 2005
Subjects:
Optical lithography > Electron beam lithography > Ion beam lithography > Fabrication technologies
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Micro-Nanofabrication: technologies and applications
by Cui,Zheng
Published 2005
Printed Book
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