Micro - nano fabrication: technologies and applications

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Bibliografski detalji
Glavni autor: Cui, Zheng
Format: Printed Book
Jezik:English
Izdano: Beijing Higher education press 2005
Teme:
Optical lithography > Electron beam lithography > Ion beam lithography > Fabrication technologies
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Micro-Nanofabrication: technologies and applications
od Cui,Zheng
Izdano 2005
Printed Book
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