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| LEADER |
00642nam a22001697a 4500 |
| 005 |
20151026130328.0 |
| 008 |
091020t xxu||||| |||| 00| 0 eng d |
| 020 |
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|a 7-04-017663-7
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| 080 |
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|a 621.71.9
|b CUI
|
| 100 |
|
|
|a Cui, Zheng
|9 7593
|
| 245 |
|
|
|a Micro - nano fabrication:
|b technologies and applications
|
| 260 |
|
|
|a Beijing
|b Higher education press
|c 2005
|9 7594
|
| 300 |
|
|
|a x, 304p.
|
| 653 |
|
|
|a Optical lithography
|a Electron beam lithography
|a Ion beam lithography
|a Fabrication technologies
|
| 942 |
|
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|c BK
|6 _
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| 999 |
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|c 3329
|d 3329
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|1 0
|2 udc
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|6 621719_CUI
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|9 13722
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|b UL
|d 2009-10-20
|o 621.71.9 CUI
|p 00055233
|r 2009-10-20
|w 2009-10-20
|y BK
|