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Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Sonraí Bibleagrafaíochta
Príomhúdar:	Schellenberg, F.M. [ed.] (ed. by)
Formáid:	Printed Book
Teanga:	English
Foilsithe:	Washington SPIE Press 2004
Sraith:	(SPIE milestone series v.178)
Ábhair:	Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography

Míreanna Comhchosúla

Lithography main techniques
le: Landis, Stefan., ed
Foilsithe: (2011)

A history of Lithography
le: Weber, Wilhelm
Foilsithe: (1966)

Chemistry and lithography
le: Okoroanyanwu, Uzodinma; Author
Foilsithe: (2010)

Dry etching for microelectronics
le: Powell, Ronald A, Ed
Foilsithe: (1984)

Laser microfabrication : thin film processes and lithography /
Foilsithe: (1989)

Reprographic methods
le: Rowlatt, K T
Foilsithe: (1986)

Microlothography: science and technology
le: Sheats, James R; Editor, et al.
Foilsithe: (1998)

Plasma processes for semiconductor fabrication
le: Hitchon, W. Nicholas G.
Foilsithe: (1999)

Microlithography : science and technology /
Foilsithe: (1998)

Micro - nano fabrication: technologies and applications
le: Cui, Zheng
Foilsithe: (2005)

Etching of crystals : theory, experiment, and application /
le: Sangwal, Keshra
Foilsithe: (1987)

Functional electronics
le: Ramanan, K V
Foilsithe: (1997)

Laser microfabrication : thin film processes and lithography
le: Ehrlich, Daniel, J.
Foilsithe: (1989)

Photopolymerisation and photoimaging science and technology /
Foilsithe: (1989)

Optical integrated cicuits
le: Nishihara, Hiroshi
Foilsithe: (1985)

Integrated Optical circuits and components: design and application
le: Murphy, Edmond.J
Foilsithe: (1999)

Modern optical engineering : the design of optical systems
le: Smith, Warren, J.
Foilsithe: (1990)

Introduction to nanoelectronic single-electron circuit design /
le: Hoekstra, Jaap
Foilsithe: (2010)

Digital integrated circuits : analysis and design /
le: Ayers, John E.
Foilsithe: (2010)

Analog integrated circuit design
le: Johns, David
Foilsithe: (2008)

Digital design : principles and practices /
le: Wakerly, John F.
Foilsithe: (2008)

Digital design : principles and practices /
le: Wakerly, John F.
Foilsithe: (2008)

Digital design :/4th ed. principles and practices /
le: Wakerly, John F.
Foilsithe: (2006)

Analog Integrated Circuit Design
le: David Johns and Kenneth W. Martin
Foilsithe: (1997)

Nanoimprint lithography : an enabling process for nanofabrication /
le: Zhou, Weimin
Foilsithe: (2013)

Laser microfabrication: thin film process and lithography
le: Laser
Foilsithe: (1989)

The Semiconductor Integrated Circuits Layout-Design Act, 2000
le: Bare Act
Foilsithe: (2015)

Handbook of optical design
le: Malacara Hernandez, Daniel
Foilsithe: (2013)

Periodic materials and interference lithography: for photonics, photonics and mechanics
le: Maldovan, Martin
Foilsithe: (2009)

first course in digital systems design: an integrated approach
le: Uyemura, John P.
Foilsithe: (2003)

Modern optical engineering : the design of optical systems /
le: Smith, Warren J.
Foilsithe: (1990)

Procedures in applied optics /
le: Strong, John, 1905-
Foilsithe: (1989)

Modular optical design /
le: Stavroudis, O. N.
Foilsithe: (1982)

The science and engineering of microelectronic fabrication /
le: Campbell, Stephen A.
Foilsithe: (1996)

VLSIDesign for manufacturing yield enhancement
le: Director, Stephen W.
Foilsithe: (1990)

Integrated Circuits and Semiconductor Devices: Theory and Application
le: Deboo,Gordon J.
Foilsithe: (1977)

Device electronics for integrated circuits /
le: Muller, Richard S.
Foilsithe: (1977)

Electronic circuits : design and applications /
le: Tietze, U.
Foilsithe: (1991)

Solid-state devices and integrated circuits /
le: Cooper, William David
Foilsithe: (1982)

Patterning of materian layers in submicron region
le: Tandon, U S; Khokle, W S
Foilsithe: (1993)