Lanean...
Selected papers on resolution enhancement techniques in optical lithography-Bellingham
| Egile nagusia: | Schellenberg, F.M. [ed.] (ed. by) |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
Washington
SPIE Press
2004
|
| Saila: | (SPIE milestone series v.178)
|
| Gaiak: |
Antzeko izenburuak
-
Lithography main techniques
nork: Landis, Stefan., ed
Argitaratua: (2011) -
A history of Lithography
nork: Weber, Wilhelm
Argitaratua: (1966) -
Chemistry and lithography
nork: Okoroanyanwu, Uzodinma; Author
Argitaratua: (2010) -
Dry etching for microelectronics
nork: Powell, Ronald A, Ed
Argitaratua: (1984) -
Laser microfabrication : thin film processes and lithography /
Argitaratua: (1989)