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Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Bibliografiske detaljer
Hovedforfatter:	Schellenberg, F.M. [ed.] (ed. by)
Format:	Printed Book
Sprog:	English
Udgivet:	Washington SPIE Press 2004
Serier:	(SPIE milestone series v.178)
Fag:	Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography

Lignende værker

Lithography main techniques
af: Landis, Stefan., ed
Udgivet: (2011)

A history of Lithography
af: Weber, Wilhelm
Udgivet: (1966)

Chemistry and lithography
af: Okoroanyanwu, Uzodinma; Author
Udgivet: (2010)

Dry etching for microelectronics
af: Powell, Ronald A, Ed
Udgivet: (1984)

Laser microfabrication : thin film processes and lithography /
Udgivet: (1989)

Reprographic methods
af: Rowlatt, K T
Udgivet: (1986)

Microlothography: science and technology
af: Sheats, James R; Editor, et al.
Udgivet: (1998)

Plasma processes for semiconductor fabrication
af: Hitchon, W. Nicholas G.
Udgivet: (1999)

Microlithography : science and technology /
Udgivet: (1998)

Micro - nano fabrication: technologies and applications
af: Cui, Zheng
Udgivet: (2005)

Etching of crystals : theory, experiment, and application /
af: Sangwal, Keshra
Udgivet: (1987)

Functional electronics
af: Ramanan, K V
Udgivet: (1997)

Laser microfabrication : thin film processes and lithography
af: Ehrlich, Daniel, J.
Udgivet: (1989)

Photopolymerisation and photoimaging science and technology /
Udgivet: (1989)

Optical integrated cicuits
af: Nishihara, Hiroshi
Udgivet: (1985)

Integrated Optical circuits and components: design and application
af: Murphy, Edmond.J
Udgivet: (1999)

Modern optical engineering : the design of optical systems
af: Smith, Warren, J.
Udgivet: (1990)

Introduction to nanoelectronic single-electron circuit design /
af: Hoekstra, Jaap
Udgivet: (2010)

Digital integrated circuits : analysis and design /
af: Ayers, John E.
Udgivet: (2010)

Analog integrated circuit design
af: Johns, David
Udgivet: (2008)

Digital design : principles and practices /
af: Wakerly, John F.
Udgivet: (2008)

Digital design : principles and practices /
af: Wakerly, John F.
Udgivet: (2008)

Digital design :/4th ed. principles and practices /
af: Wakerly, John F.
Udgivet: (2006)

Analog Integrated Circuit Design
af: David Johns and Kenneth W. Martin
Udgivet: (1997)

Nanoimprint lithography : an enabling process for nanofabrication /
af: Zhou, Weimin
Udgivet: (2013)

Laser microfabrication: thin film process and lithography
af: Laser
Udgivet: (1989)

The Semiconductor Integrated Circuits Layout-Design Act, 2000
af: Bare Act
Udgivet: (2015)

Handbook of optical design
af: Malacara Hernandez, Daniel
Udgivet: (2013)

Periodic materials and interference lithography: for photonics, photonics and mechanics
af: Maldovan, Martin
Udgivet: (2009)

first course in digital systems design: an integrated approach
af: Uyemura, John P.
Udgivet: (2003)

Modern optical engineering : the design of optical systems /
af: Smith, Warren J.
Udgivet: (1990)

Procedures in applied optics /
af: Strong, John, 1905-
Udgivet: (1989)

Modular optical design /
af: Stavroudis, O. N.
Udgivet: (1982)

The science and engineering of microelectronic fabrication /
af: Campbell, Stephen A.
Udgivet: (1996)

VLSIDesign for manufacturing yield enhancement
af: Director, Stephen W.
Udgivet: (1990)

Integrated Circuits and Semiconductor Devices: Theory and Application
af: Deboo,Gordon J.
Udgivet: (1977)

Device electronics for integrated circuits /
af: Muller, Richard S.
Udgivet: (1977)

Electronic circuits : design and applications /
af: Tietze, U.
Udgivet: (1991)

Solid-state devices and integrated circuits /
af: Cooper, William David
Udgivet: (1982)

Patterning of materian layers in submicron region
af: Tandon, U S; Khokle, W S
Udgivet: (1993)