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Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Manylion Llyfryddiaeth
Prif Awdur:	Schellenberg, F.M. [ed.] (ed. by)
Fformat:	Printed Book
Iaith:	English
Cyhoeddwyd:	Washington SPIE Press 2004
Cyfres:	(SPIE milestone series v.178)
Pynciau:	Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography

Eitemau Tebyg

Lithography main techniques
gan: Landis, Stefan., ed
Cyhoeddwyd: (2011)

A history of Lithography
gan: Weber, Wilhelm
Cyhoeddwyd: (1966)

Chemistry and lithography
gan: Okoroanyanwu, Uzodinma; Author
Cyhoeddwyd: (2010)

Dry etching for microelectronics
gan: Powell, Ronald A, Ed
Cyhoeddwyd: (1984)

Laser microfabrication : thin film processes and lithography /
Cyhoeddwyd: (1989)

Reprographic methods
gan: Rowlatt, K T
Cyhoeddwyd: (1986)

Microlothography: science and technology
gan: Sheats, James R; Editor, et al.
Cyhoeddwyd: (1998)

Plasma processes for semiconductor fabrication
gan: Hitchon, W. Nicholas G.
Cyhoeddwyd: (1999)

Microlithography : science and technology /
Cyhoeddwyd: (1998)

Micro - nano fabrication: technologies and applications
gan: Cui, Zheng
Cyhoeddwyd: (2005)

Etching of crystals : theory, experiment, and application /
gan: Sangwal, Keshra
Cyhoeddwyd: (1987)

Functional electronics
gan: Ramanan, K V
Cyhoeddwyd: (1997)

Laser microfabrication : thin film processes and lithography
gan: Ehrlich, Daniel, J.
Cyhoeddwyd: (1989)

Photopolymerisation and photoimaging science and technology /
Cyhoeddwyd: (1989)

Optical integrated cicuits
gan: Nishihara, Hiroshi
Cyhoeddwyd: (1985)

Integrated Optical circuits and components: design and application
gan: Murphy, Edmond.J
Cyhoeddwyd: (1999)

Modern optical engineering : the design of optical systems
gan: Smith, Warren, J.
Cyhoeddwyd: (1990)

Introduction to nanoelectronic single-electron circuit design /
gan: Hoekstra, Jaap
Cyhoeddwyd: (2010)

Digital integrated circuits : analysis and design /
gan: Ayers, John E.
Cyhoeddwyd: (2010)

Analog integrated circuit design
gan: Johns, David
Cyhoeddwyd: (2008)

Digital design : principles and practices /
gan: Wakerly, John F.
Cyhoeddwyd: (2008)

Digital design : principles and practices /
gan: Wakerly, John F.
Cyhoeddwyd: (2008)

Digital design :/4th ed. principles and practices /
gan: Wakerly, John F.
Cyhoeddwyd: (2006)

Analog Integrated Circuit Design
gan: David Johns and Kenneth W. Martin
Cyhoeddwyd: (1997)

Nanoimprint lithography : an enabling process for nanofabrication /
gan: Zhou, Weimin
Cyhoeddwyd: (2013)

Laser microfabrication: thin film process and lithography
gan: Laser
Cyhoeddwyd: (1989)

The Semiconductor Integrated Circuits Layout-Design Act, 2000
gan: Bare Act
Cyhoeddwyd: (2015)

Handbook of optical design
gan: Malacara Hernandez, Daniel
Cyhoeddwyd: (2013)

Periodic materials and interference lithography: for photonics, photonics and mechanics
gan: Maldovan, Martin
Cyhoeddwyd: (2009)

first course in digital systems design: an integrated approach
gan: Uyemura, John P.
Cyhoeddwyd: (2003)

Modern optical engineering : the design of optical systems /
gan: Smith, Warren J.
Cyhoeddwyd: (1990)

Procedures in applied optics /
gan: Strong, John, 1905-
Cyhoeddwyd: (1989)

Modular optical design /
gan: Stavroudis, O. N.
Cyhoeddwyd: (1982)

The science and engineering of microelectronic fabrication /
gan: Campbell, Stephen A.
Cyhoeddwyd: (1996)

VLSIDesign for manufacturing yield enhancement
gan: Director, Stephen W.
Cyhoeddwyd: (1990)

Integrated Circuits and Semiconductor Devices: Theory and Application
gan: Deboo,Gordon J.
Cyhoeddwyd: (1977)

Device electronics for integrated circuits /
gan: Muller, Richard S.
Cyhoeddwyd: (1977)

Electronic circuits : design and applications /
gan: Tietze, U.
Cyhoeddwyd: (1991)

Solid-state devices and integrated circuits /
gan: Cooper, William David
Cyhoeddwyd: (1982)

Patterning of materian layers in submicron region
gan: Tandon, U S; Khokle, W S
Cyhoeddwyd: (1993)