Selected papers on resolution enhancement techniques in optical lithography-Bellingham

類似資料

• Lithography main techniques
  著者:: Landis, Stefan., ed
  出版事項: (2011)
• A history of Lithography
  著者:: Weber, Wilhelm
  出版事項: (1966)
• Chemistry and lithography
  著者:: Okoroanyanwu, Uzodinma; Author
  出版事項: (2010)
• Dry etching for microelectronics
  著者:: Powell, Ronald A, Ed
  出版事項: (1984)
• Laser microfabrication : thin film processes and lithography /
  出版事項: (1989)