Selected papers on resolution enhancement techniques in optical lithography-Bellingham

书目详细资料
主要作者: Schellenberg, F.M. [ed.] (ed. by)
格式: Printed Book
语言:English
出版: Washington SPIE Press 2004
丛编:(SPIE milestone series v.178)
主题:
Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography
实物特征
实物描述:xx, 875p.
ISBN:0-8194-5166-5

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