Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Bibliografiska uppgifter
Huvudupphovsman: Schellenberg, F.M. [ed.] (ed. by)
Materialtyp: Printed Book
Språk:English
Publicerad: Washington SPIE Press 2004
Serie:(SPIE milestone series v.178)
Ämnen:
Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography
Beskrivning
Fysisk beskrivning:xx, 875p.
ISBN:0-8194-5166-5

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