Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Bibliografske podrobnosti
Glavni avtor: Schellenberg, F.M. [ed.] (ed. by)
Format: Printed Book
Jezik:English
Izdano: Washington SPIE Press 2004
Serija:(SPIE milestone series v.178)
Teme:
Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography
Opis
Fizični opis:xx, 875p.
ISBN:0-8194-5166-5

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