Selected papers on resolution enhancement techniques in optical lithography-Bellingham

ग्रंथसूची विवरण
मुख्य लेखक: Schellenberg, F.M. [ed.] (ed. by)
स्वरूप: Printed Book
भाषा:English
प्रकाशित: Washington SPIE Press 2004
श्रृंखला:(SPIE milestone series v.178)
विषय:
Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography
विवरण
भौतिक वर्णन:xx, 875p.
आईएसबीएन:0-8194-5166-5

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