Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Sonraí Bibleagrafaíochta
Príomhúdar: Schellenberg, F.M. [ed.] (ed. by)
Formáid: Printed Book
Teanga:English
Foilsithe: Washington SPIE Press 2004
Sraith:(SPIE milestone series v.178)
Ábhair:
Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography
Cur Síos
Cur Síos Fisiciúil:xx, 875p.
ISBN:0-8194-5166-5

Míreanna Comhchosúla