Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Bibliographic Details
Main Author: Schellenberg, F.M. [ed.] (ed. by)
Format: Printed Book
Language:English
Published: Washington SPIE Press 2004
Series:(SPIE milestone series v.178)
Subjects:
Integrated circuits-design and construction > Microlithography > Photolithography > semiconductors-Etching > Optical lithography
Description
Physical Description:xx, 875p.
ISBN:0-8194-5166-5

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