Schellenberg, F. [. (2004). Selected papers on resolution enhancement techniques in optical lithography-Bellingham. SPIE Press.
Chicago Edition CitationSchellenberg, F.M. [ed.]. Selected Papers on Resolution Enhancement Techniques in Optical Lithography-Bellingham. Washington: SPIE Press, 2004.
MLA引文Schellenberg, F.M. [ed.]. Selected Papers on Resolution Enhancement Techniques in Optical Lithography-Bellingham. SPIE Press, 2004.
警告:这些引文格式不一定是100%准确.