Schellenberg, F. [. (2004). Selected papers on resolution enhancement techniques in optical lithography-Bellingham. SPIE Press.
Dyfyniad Arddull ChicagoSchellenberg, F.M. [ed.]. Selected Papers on Resolution Enhancement Techniques in Optical Lithography-Bellingham. Washington: SPIE Press, 2004.
Dyfyniad MLASchellenberg, F.M. [ed.]. Selected Papers on Resolution Enhancement Techniques in Optical Lithography-Bellingham. SPIE Press, 2004.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.