Cita APA

Schellenberg, F. [. (2004). Selected papers on resolution enhancement techniques in optical lithography-Bellingham. SPIE Press.

Chicago Edition Citation

Schellenberg, F.M. [ed.]. Selected Papers on Resolution Enhancement Techniques in Optical Lithography-Bellingham. Washington: SPIE Press, 2004.

Cita MLA

Schellenberg, F.M. [ed.]. Selected Papers on Resolution Enhancement Techniques in Optical Lithography-Bellingham. SPIE Press, 2004.