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Micromanufacturing and nanotechnology

Bibliografiska uppgifter
Huvudupphovsman:	Mahalik, N.P.[ed.] (ed.by)
Materialtyp:	Printed Book
Språk:	English
Publicerad:	Germany Springer- Verlag 2006
Ämnen:	Nanotechnology > Micro manufacturing > Microelectromechanical system (MEMS) > Micro-opto-electro-mechanical system (MOEMS) > (MEMS) > (MOEMS)

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