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00688nam a22001697a 4500 |
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20151026130323.0 |
| 008 |
091016t xxu||||| |||| 00| 0 eng d |
| 020 |
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|a 3-540-25377-7
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| 080 |
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|a 621.7/9
|b MAH
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| 100 |
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|a Mahalik, N.P.[ed.]
|e ed.by
|9 7261
|
| 245 |
|
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|a Micromanufacturing and nanotechnology
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| 260 |
|
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|a Germany
|b Springer- Verlag
|c 2006
|9 7262
|
| 300 |
|
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|a xiv, 468p.
|
| 653 |
|
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|a Nanotechnology
|a Micro manufacturing
|a Microelectromechanical system (MEMS)
|a Micro-opto-electro-mechanical system (MOEMS)
|a (MEMS)
|a (MOEMS)
|
| 942 |
|
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|c BK
|6 _
|
| 999 |
|
|
|c 3149
|d 3149
|
| 952 |
|
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|0 0
|1 0
|2 udc
|4 0
|6 62179_MAH
|7 0
|9 13468
|a UL
|b UL
|d 2009-10-16
|l 1
|o 621.7/9 MAH
|p 00055110
|r 2011-06-27
|s 2011-05-28
|w 2009-10-16
|y BK
|