Micromanufacturing and nanotechnology

书目详细资料
主要作者: Mahalik, N.P.[ed.] (ed.by)
格式: Printed Book
语言:English
出版: Germany Springer- Verlag 2006
主题:
Nanotechnology > Micro manufacturing > Microelectromechanical system (MEMS) > Micro-opto-electro-mechanical system (MOEMS) > (MEMS) > (MOEMS)
实物特征
实物描述:xiv, 468p.
ISBN:3-540-25377-7

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