Micromanufacturing and nanotechnology

Détails bibliographiques
Auteur principal: Mahalik, N.P.[ed.] (ed.by)
Format: Printed Book
Langue:English
Publié: Germany Springer- Verlag 2006
Sujets:
Nanotechnology > Micro manufacturing > Microelectromechanical system (MEMS) > Micro-opto-electro-mechanical system (MOEMS) > (MEMS) > (MOEMS)
Description
Description matérielle:xiv, 468p.
ISBN:3-540-25377-7

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