Micromanufacturing and nanotechnology

Detalles Bibliográficos
Autor principal: Mahalik, N.P.[ed.] (ed.by)
Formato: Printed Book
Lenguaje:English
Publicado: Germany Springer- Verlag 2006
Materias:
Nanotechnology > Micro manufacturing > Microelectromechanical system (MEMS) > Micro-opto-electro-mechanical system (MOEMS) > (MEMS) > (MOEMS)
Descripción
Descripción Física:xiv, 468p.
ISBN:3-540-25377-7

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