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00568nam a22001697a 4500 |
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20151026130321.0 |
| 008 |
091016t xxu||||| |||| 00| 0 eng d |
| 020 |
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|a 81-8128-202-7
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| 080 |
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|a 608.001.76
|b FUJ
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| 100 |
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|a Fujita, H.
|9 7163
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| 245 |
|
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|a Micromachines as tools for nanotechnology
|
| 260 |
|
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|a New Delhi
|b Springer
|c 2004
|9 7164
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| 300 |
|
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|a xii, 212p.
|
| 653 |
|
|
|a Microtechnology
|a MEMS
|a Nanotechnology
|
| 942 |
|
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|c BK
|6 _
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| 999 |
|
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|c 3101
|d 3101
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| 952 |
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|6 60800176_FUJ
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|9 13407
|a UL
|b UL
|d 2009-10-16
|o 608.001.76 FUJ
|p 00054300
|r 2009-10-16
|w 2009-10-16
|y BK
|