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Integrated chemical microsensor systems in CMOS technology

Detalles Bibliográficos
Autor principal:	Hierlemann, Andreas
Formato:	Printed Book
Lenguaje:	English
Publicado:	New York Springer 2005
Materias:	Microsenor systems - Chemical > Chemical microsensor system > CMOS > Metal oxide semiconductor > Microelectromechanical systems

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