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091016t xxu||||| |||| 00| 0 eng d |
| 020 |
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|a 3-540-23782-8
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| 080 |
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|a 621.3.049.77
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| 100 |
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|a Hierlemann, Andreas
|9 7104
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| 245 |
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|a Integrated chemical microsensor systems in CMOS technology
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| 260 |
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|a New York
|b Springer
|c 2005
|9 6525
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| 300 |
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|a x, 229p.
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| 500 |
|
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|a Microtechnology and MEMS
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| 653 |
|
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|a Microsenor systems - Chemical
|a Chemical microsensor system
|a CMOS
|a Metal oxide semiconductor
|a Microelectromechanical systems
|
| 942 |
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|c BK
|6 _
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| 999 |
|
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|c 3074
|d 3074
|
| 952 |
|
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|0 0
|1 0
|2 udc
|4 0
|6 621304977_HIE
|7 0
|9 13380
|a UL
|b UL
|d 2009-10-16
|o 621.3.049.77 HIE
|p 00054890
|r 2009-10-16
|w 2009-10-16
|y BK
|