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Integrated chemical microsensor systems in CMOS technology
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| Format: | Printed Book |
| Langue: | English |
| Publié: |
New York
Springer
2005
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| Sujets: |
| Description: | Microtechnology and MEMS |
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| Description matérielle: | x, 229p. |
| ISBN: | 3-540-23782-8 |