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Fundamental principles of engineering nanometrology

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Bibliografiska uppgifter
Huvudupphovsman:	Leach, Richard (Författare, medförfattare)
Materialtyp:	Printed Book
Språk:	English
Publicerad:	Amsterdam, Elsevier 2014.
Upplaga:	2nd ed.
Ämnen:	Nanotechnology Microtechnology Metrology

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