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Fundamental principles of engineering nanometrology

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Xehetasun bibliografikoak
Egile nagusia:	Leach, Richard (Egilea)
Formatua:	Printed Book
Hizkuntza:	English
Argitaratua:	Amsterdam, Elsevier 2014.
Edizioa:	2nd ed.
Gaiak:	Nanotechnology Microtechnology Metrology

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