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170221t xxu||||| |||| 00| 0 eng d |
| 082 |
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|a 620.50287
|b LEA
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| 100 |
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|a Leach, Richard
|e author
|9 9637
|
| 245 |
|
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|a Fundamental principles of engineering nanometrology
|c Richard Leach
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| 250 |
|
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|a 2nd ed.
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| 300 |
|
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|a xxi, 361 p.
|
| 653 |
|
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|a Nanotechnology
|
| 653 |
|
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|a Microtechnology
|
| 653 |
|
|
|a Metrology
|
| 942 |
|
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|c BK
|6 _
|
| 260 |
|
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|a Amsterdam,
|b Elsevier
|c 2014.
|
| 020 |
|
|
|a 9781455777532
|
| 999 |
|
|
|c 215805
|d 215805
|
| 952 |
|
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|0 0
|1 0
|2 ddc
|4 0
|6 62050287_LEA
|7 0
|9 279777
|a PHY
|b PHY
|d 2017-02-21
|o 620.50287 LEA
|p PHY014751
|r 2018-05-17
|w 2018-05-17
|y BK
|