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Fundamental principles of engineering nanometrology
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| Format: | Printed Book |
| Langue: | English |
| Publié: |
Amsterdam,
Elsevier
2014.
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| Édition: | 2nd ed. |
| Sujets: |
| Description matérielle: | xxi, 361 p. |
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| ISBN: | 9781455777532 |